Mitutoyo Releases the Hyper MF/MF-U Measuring Microscopes Capable of the World's Highest Precision Measurement

Hyper MF

Mitutoyo Corporation (head office: Takatsu-ku, Kawasaki; president: Kazusaku Tezuka) has developed and commercialized the Hyper MF/MF-U high-precision measuring microscopes. In addition to a major enhancement in operability, the new products have achieved extremely high precision, far exceeding the degree of required precision specified in Class 0 of the related Japanese Industrial Standard (JIS). The new products, which will go on sale on November 21, 2004, will be exhibited at the 22nd Japan International Machine Tool Fair (JIMTOF 2004), which begins on November 1, 2004 at Tokyo Big Sight. In 2001, Mitutoyo commercialized the MF-A/MF-UA series of measuring microscopes and has since established itself as a manufacturer of optical measuring machines. To meet the demand for non-contact, high-precision measurement, especially in the fields of electronics, semiconductors, information technology, and automobiles, the company has recently developed high-precision measuring microscopes, by integrating its technologies as a comprehensive manufacturer of measuring instruments. Each of the Hyper MF/MF-U high-precision measuring microscopes uses a no-overhang XY table placed on a high-rigidity base, as well as a low-expansion glass scale. In addition to long strokes measuring 250mm for the X-axis and 150mm for the Y-axis, this has enabled high precision of (0.9+3L/1000) mm and high loading weight of 30kg. The electric drive for all axes using a joystick has also achieved fine feed capable of positioning at the level of 0.1mm and high-speed feed leading to a maximum of 30mm/sec. Further, by operating the joystick, the stage can be moved freely--even in a diagonal direction--with a high degree of operability. The Hyper MF-U provides an optional auto-focus function comprising "Tracking Focus" for installing laser auto-focus and "Just Focus" with high repeatability. The result of this is excellent focusing with enhanced operability and repeatability. For a data processing unit, the QM-Data200 and the Vision unit can be selected as an option. This facilitates efficient high-precision measurement with a precision compensation function and a variety of measurement functions available.

[Projected Sales]

Sales projection for first year: 30 units

[Features]

(1) High measuring accuracy that significantly surpasses the JIS Class 0 level at full stroke • Measuring range (X-axis x Y-axis): 250 x 150 mm • Measuring accuracy (X- and Y-axis): (0.9+3L/1000) mm, where L shows the measuring length (2) Stage capable of loading a weight of 30kg • There has been a major improvement in terms of the weight that can be handled by the stage. The stage is now capable of measuring even heavy workpieces. In addition, an optional center support is also available for measuring even large-cutting tools. (3) Electrically-driven axes with a joystick offer improved operability • With the joystick's tilting angle, speed control knobs and the fine feed selector button, customers can freely select a drive speed from low to high. (4) Optional laser auto focus function provides improved operability and repeatability • Repeatability in focusing with 2σ = 0.8mm or a lower value can be achieved when an objective lens of 10x or higher is used. (Assuming that Mitutoyo's reference workpiece is used) (5) Serving also as a vision measuring machine • Switching the data processing unit to the Vision unit makes vision measuring possible. This leads to a major reduction in measurement time, as well as high-precision measurement involving fewer combined and personal errors.

[Specifications]

�@ Hyper MF Hyper MF-U Optical tube Finity-corrected optical system Infinity-corrected optical system Measuring range (mm) 250 (X-axis) x 150 (Y-axis) x 150 (Z-axis) Measuring accuracy X- and Y-axis (0.9+3L/1000) μm L = Measurement length Z-axis (1.5+10L/1000) μm L = Measurement length Length-measuring unit Low-expansion glass scale (Coefficient of linear thermal expansion = 0.02 *10-6/oC) Drive method Motor-driven control with a joystick Resolution 0.01μm Maximum loading weight 30kg Surface illumination Telecentric illumination 12V50W with a fiber aperture diaphragm Contour illumination Koehler illumination 12V100W with a fiber aperture diaphragm Mass 250kg 255kg

[For Information, Please Contact]

Vision & Optical System Sales Group, Overseas Sales Division, Mitutoyo Corporation Phone : +81-44-813-5410, Fax : +81-44-813-5433 or E-mail : VISION@mitutoyo.co.jp

October 27, 2004

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