Measurement-target object/material

Metal transparent object resin wood mirrored surface object rubber/soft material

Measurement item

- Externals - height - thickness/unevenness - width - depth - internal diameter - displacement - positioning - distortion - inclination - warpage - run-out - length - gap

Clearance for workpiece and measuring tool

- Contact - No contact

Accuracy

- Less than 1um - 1um to 5um exclusive - 10um or greater - 1um to 5um exclusive - 10um or greater - 5um to 10um exclusive - 5um to 10um exclusive