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MEMS technology

Using MEMS (Micro Electro Mechanical Systems) technology, MITUTOYO has developed probes that can record incredibly small internal diameter measurements.
UMAP probe / Micro EDM

UMAP probe / Micro EDM

Micro EDM (micro electrical discharge machine)

Micro EDM (micro electrical discharge machine)


Equipment with MEMS technology
MEMS technology is being used to develop various types of sensors.
ICP etching equipment (for Si-MEMS)

ICP etching equipment (for Si-MEMS)
Application examples Micro acceleration sensor

Application examples Micro acceleration sensor