J-13JMicroscopesMicroscope lineups that systemize observation, measurement and processingMitutoyo reserves the right to change any or all aspects of any product specication, including prices, designs and service content, without notice.FS-70 SERIES 378 — Microscope Unit for Semiconductor Inspection•Compact microscope unit equipped with an eyepiece observation section.•Can be used with YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers.*1*1 The performance and safety of laser-equipped system products is not guaranteed. •Usable in infrared optical systems*2.Applications: observation of silicon wafers; spectral characteristics analysis using infrared.*2 An infrared source and infrared camera are necessary.•Models supporting BF (Bright-eld), DF (Dark-eld), Polarization, and Differential Interference Contrast (DIC) are available.•The inward-facing turret and long working distance objective lenses maintain the high operability of the microscope.Note: The parfocal manual turret, eyepieces and objective lenses are optional.FS70ZRefer to the Microscope Units and ObjectivesBrochure (E14020) for more details.FS70L4SPECIFICATIONSStandard head typeModel No.FS70—FS70Z—FS70ZDFS70LFS70L4Order No.378-184-1—378-185-1—Made-to-order378-186-1378-187-1Tilting head typeModel No.—FS70-TH—FS70Z-THFS70ZD-THFS70L-THFS70L4-THOrder No.—378-184-3—378-185-3Made-to-order378-186-3378-187-3Focus adjustment50 mm travel range with concentric coarse (3.8 mm/rev) and ne (0.1 mm/rev) focusing wheels (right/left)Observation imageErect imageBF (Bright-field)444444BD (Bright-field/Dark-field)4Polarization4444444Differential Interference Contrast (DIC)44444Optical tube typeSiedentopf, adjustable interpupillary distance range: 51 to 76 mmField number24 mmTilt angle0 to 20°, displacement of eye point: 114 mm (only for tilting head type)Optical pass ratioFixed type(Eyepiece/TV= 50/50)Switchable type(Eyepiece/Tube=100/0: 0/100)Fixed type(Eyepiece/TV= 50/50)Switchable type(Eyepiece/Tube=100/0: 0/100)Fixed type*3(Eyepiece/TV= 50/50)Switchable type(Eyepiece/Tube=100/0: 0/100)Protective lter—Built-in laser beam lterTube lens1X1X to 2X zoom1XApplicable laser—1064/532/355 nm532/266 nmCamera mountC-mount (using optional adapter B*1)Use a laser with TV port.C-mount receptacle(with green lter switch)Illumination system, optionalReective illumination for Bright-eld (Koehler illumination, with aperture diaphragm)12 V, 100 W ber-optics, stepless adjustment, light guide length: 1.5 mObjective, optional (for observation)M Plan Apo/HR/SL, G Plan ApoBD Plan ApoM Plan Apo/HR/SL, G Plan ApoObjective, optional (for laser-cutting)—NIR SeriesNUV SeriesUV SeriesLoading*214.5 kg13.6 kg14.1 kg13.2 kg14.1 kg (tilting headtype: 13.2 kg)14.2 kg (tilting headtype: 13.5 kg)13.9 kg (tilting headtype: 13.1 kg)Mass (main unit)6.1 kg7.1 kg6.6 kg7.5 kg6.6 kg (tilting headtype: 7.5 kg)6.4 kg (tilting headtype: 7.2 kg)6.7 kg (tilting headtype: 7.5 kg)*1 Installation is optional.*2 Loading on optical tube excluding weight of objective lenses and eyepieces*3 It is a switchable type when using FS70ZD-TH (Tilting head type).Note: Observe the following precautions when using FS70L or FS70L4 with YAG laser source attached.· Be aware of the laser power and energy density limitations of the optical system to avoid damage.· Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us.Bulb replacement Standard: Halogen bulb (12 V, 100 W) (517181）For the fiber-optic cable illumination unit (12 V, 100 W) (378-700)
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